Room-temperature growth of superconducting β-Bi ₂ Pd thin films

Abstract Superconducting β-Bi 2 Pd has attracted considerable interest as a candidate topological superconductor and a platform for investigating unconventional superconductivity. However, previously reported growth procedures commonly employ elevated substrate temperatures or post-growth annealing, which can restrict integration with temperature-sensitive materials and pre-patterned structures. Here, we demonstrate room-temperature magnetron co-sputtering of phase-pure, (001)-textured β-Bi 2 Pd films on amorphous and crystalline substrates. Epitaxial films are further realized by depositing β-Bi 2 Pd at room temperature on a thin epitaxial seed layer formed at elevated temperature. These results establish a low-thermal-budget route for integrating superconducting β-Bi 2 Pd into superconducting heterostructures and hybrid quantum devices.