Hybrid Classical-Quantum Neural Networks for Multi-Characteristic Co-Optimization of Recessed-Gate AlGaN/GaN MIS-HEMTs

Optimizing recessed-gate AlGaN/GaN MIS-HEMTs requires accurate multi-characteristic models, but experimental semiconductor datasets remain costly and encode process-induced variability that simulations cannot faithfully reproduce. This work proposes a hybrid classical-quantum neural network (HQNN) for joint optimization of six electrical targets from a 24-dimensional fabrication/process vector. We systematically screen quantum-circuit templates to extract circuit-design guidance, then select a final HQNN and compare it directly with classical baselines. On 468 experimental fabricated devices spanning 17 process splits, the selected HQNN, Circuit (13, 5) at L = 2, reduces overall normalized root mean square error (nRMSE) by 24.4% relative to ANN. Target-wise, the HQNN lowers Vth,lin RMSE from 0.297 V to 0.270 V, Vth,rev RMSE from 0.278 V to 0.263 V, DeltaVth RMSE from 0.049 V to 0.045 V, SS RMSE from 22.22 mV/dec to 19.87 mV/dec, and Id RMSE from 5.75 x 10^-8 A to 4.35 x 10^-8 A, while Ion RMSE remains competitive (0.053 A vs. 0.056 A). Controlled ansatz ablations further show that performance depends strongly on architecture: parameter count, depth, and two-qubit gate count correlate positively with accuracy, expressibility (DKL) correlates negatively, and controlled-rotation entanglers outperform static controlled-NOT (CNOT)-based circuits in aggregate. A depolarizing-noise study on a representative 4-qubit circuit further suggests that comparable HQNNs may be trainable or deployable on near-term quantum hardware.