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Photonic Quantum Computing Spin Qubits Silicon Quantum Computing Superconducting Qubits

Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators

arXiv
Authors: D. Kowsari, K. Zheng, J. T. Monroe, N. J. Thobaben, X. Du, P. M. Harrington, E. A. Henriksen, D. S. Wisbey, K. W. Murch

Year

2021

Paper ID

62444

Status

Preprint

Abstract Read

~2 min

Abstract Words

97

Citations

N/A

Abstract

We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature $9.20 pm 0.06 rm K$ as well as a residual resistivity ratio of 4.8. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of 2 μrm m, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as 1.5 times 10-7 with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the niobium.

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  • This paper contributes to the Superconducting Qubits research area in the Quantum Articles archive.
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  • We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions.

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References & Citation Signals

[1] DOI https://doi.org/arXiv:2108.05354 [2] arXiv https://arxiv.org/abs/2108.05354 [3] Publisher https://arxiv.org/abs/2108.05354

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