Stability studies on subtractively-fabricated CMOS-compatible superconducting transmon qubits

Developing fault-tolerant quantum processors with error correction demands large arrays of physical qubits whose key performance metrics (coherence times, control fidelities) must remain within specifications over both short and long timescales. Here we investigated the temporal stability of subtractively fabricated CMOS-compatible superconducting transmon qubits. During a single cooldown and over a period of 95 hours, we monitored several parameters for 8 qubits, including coherence times T₁ and T₂^*, which exhibit fluctuations originating primarily from the interaction between two-level system (TLS) defects and the host qubit. We also demonstrate that subtractively-fabricated superconducting quantum devices align with the theoretical predictions that higher mean lifetimes T₁ correspond to larger fluctuations. To assess long-term stability, we tracked two representative qubits over 10 cooldown cycles spanning more than one year. We observed an average total downward shift in both qubit transition frequencies of approximately 61 MHz within the thermal cycles considered. In contrast, readout resonator frequencies decreased only marginally. Meanwhile, T₁ exhibits fluctuations from cycle to cycle, but maintains a stable baseline value.