Parallel low-loss measurement of multiple atomic qubits

We demonstrate low-loss measurement of the hyperfine ground state of Rubidium atoms in a dipole trap array of five sites by state dependent fluorescence detection. The presence of atoms and their internal states are minimally altered by utilizing circularly polarized probe light and a strictly controlled quantization axis. We achieve mean state detection fidelity of 97\% without correcting for imperfect state preparation or background losses, and 98.7\% when corrected. After state detection and correction for background losses, the probability of atom loss due to the state measurement is <2\% and the initial hyperfine state is preserved with >98\% probability.