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Photonic Quantum Computing
Superconducting Qubits
Superconducting Through-Silicon Vias for Quantum Integrated Circuits
arXiv
Authors: Mehrnoosh Vahidpour, William O'Brien, Jon Tyler Whyland, Joel Angeles, Jayss Marshall, Diego Scarabelli, Genya Crossman, Kamal Yadav, Yuvraj Mohan, Catvu Bui, Vijay Rawat, Russ Renzas, Nagesh Vodrahalli, Andrew Bestwick, Chad Rigetti
Year
2017
Paper ID
44158
Status
Preprint
Abstract Read
~2 min
Abstract Words
57
Citations
N/A
Abstract
We describe a microfabrication process for superconducting through-silicon vias appropriate for use in superconducting qubit quantum processors. With a sloped-wall via geometry, we can use non-conformal metal deposition methods such as electron-beam evaporation and sputtering, which reliably deposit high quality superconducting films. Via superconductivity is validated by demonstrating zero via-to-via resistance below the critical temperature of aluminum.
Why This Paper Matters
- This paper contributes to the Superconducting Qubits research area in the Quantum Articles archive.
- It adds a 2017 reference point for readers tracking recent quantum research.
- We describe a microfabrication process for superconducting through-silicon vias appropriate for use in superconducting qubit quantum processors.
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