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Laser-lithographically written micron-wide superconducting nanowire single-photon detectors

arXiv
Authors: Maximilian Protte, Varun B. Verma, Jan Philipp Höpker, Richard P. Mirin, Sae Woo Nam, Tim J. Bartley

Year

2021

Paper ID

40631

Status

Preprint

Abstract Read

~2 min

Abstract Words

80

Citations

N/A

Abstract

We demonstrate the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography. We show saturated internal detection efficiencies with wire widths from 0.59μm to 1.43μm under illumination at 1550nm. We demonstrate both straight wires, as well as meandered structures. Single-photon sensitivity is shown in devices up to 4mm in length. Laser-lithographically written devices allow for fast and easy structuring of large areas while maintaining a saturated internal efficiency for wire width around 1μm.

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  • This paper contributes to the Superconducting Qubits research area in the Quantum Articles archive.
  • It adds a 2021 reference point for readers tracking recent quantum research.
  • We demonstrate the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography.

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