Deterministic formation of carbon-functionalized quantum emitters in hexagonal boron nitride

Forming single-photon emitters (SPEs) in insulating hexagonal boron nitride (hBN) has sparked wide interests in the quantum photonics. Despite significant progress, it remains challenging to deterministically create SPEs at precise locations with a specific type of element for creating defects. In this study, we present a straightforward approach to generate site-deterministic carbon-functionalized quantum emitters in hBN by harnessing ultrasonic nanoindentation. The obtained SPEs are high-quality and can be scaled up to large arrays in a single fabrication step. Comprehensive experimental analyses reveal that the insertion of carbon atoms into the hBN lattice is the source of the robust quantum emission. Complementary theoretical studies suggest possible candidates for the structural origin of the defects based on our experimental results. This rapid and scalable nanoindentation method provides a new way to create SPE arrays with specific types of atoms, enabling the comprehensive investigation of the origins and mechanics of SPE formations in two-dimensional (2D) materials and beyond.