Quick Navigation

Overview Topics Abstract Importance Paper Tools References Reactions Discussion Publication

Topics

Quantum Device Fabrication Process Engineering

Fabrication effects on Niobium oxidation and surface contamination in Niobium-metal bilayers using X-ray photoelectron spectroscopy

arXiv
Authors: Tathagata Banerjee, Maciej W. Olszewski, Valla Fatemi

Year

2026

Paper ID

3119

Status

Preprint

Abstract Read

~2 min

Abstract Words

101

Citations

0

Abstract

Superconducting resonators and qubits are limited by dielectric losses from surface oxides. Surface oxides are mitigated through various strategies such as the addition of a metal capping layer, surface passivation, and acid processing. In this study, we demonstrate the use of X-ray photoelectron spectroscopy (XPS) as a rapid characterization tool to study the effectiveness cap layers for niobium for further device fabrication. We non-destructively evaluate 17 capping layers to characterize their ability to prevent oxygen diffusion, and the effects of standard fabrication processes - annealing, resist stripping, and acid cleaning. We downselect for resilient capping layers and test their microwave resonator performance.

Why This Paper Matters

  • This paper contributes to the Quantum Device Fabrication & Process Engineering research area in the Quantum Articles archive.
  • It adds a 2026 reference point for readers tracking recent quantum research.
  • Superconducting resonators and qubits are limited by dielectric losses from surface oxides.

Paper Tools

Become a member to use research tools

Sign in to open papers, visit source links, share, cite, compare, copy DOI links, request category corrections, and build your reading list.

Become a member Sign in
Show Paper arXiv Publisher Share Cite This Paper Copy URL Compare Copy DOI Add to Reading List Category Correction Request

References & Citation Signals

[1] DOI https://doi.org/arXiv:2601.21953 [2] arXiv https://arxiv.org/abs/2601.21953 [3] Publisher https://arxiv.org/abs/2601.21953

Local Citation Graph (Related-Paper Links)

Current Paper #3119

External citation index: OpenAlex citation signal • updated 2026-06-11 17:18:30

Community Reactions

Quick sentiment from readers on this paper.

Score: 0
Likes: 0 Dislikes: 0

Sign in to react to this paper.

Discussion & Reviews (Moderated)

Average Rating: 0.0 / 5 (0 ratings)

No written reviews yet.