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Photonic Quantum Computing

Fabrication and characterization of high quality factor silicon nitride nanobeam cavities

arXiv
Authors: Mughees Khan, Thomas Babinec, Murray W. McCutcheon, Parag Deotare, Marko Lončar

Year

2010

Paper ID

10638

Status

Preprint

Abstract Read

~2 min

Abstract Words

110

Citations

N/A

Abstract

Si3N4 is an excellent material for applications of nanophotonics at visible wavelengths due to its wide bandgap and moderately large refractive index n $approx$ 2.0. We present the fabrication and characterization of Si3N4 photonic crystal nanobeam cavities for coupling to diamond nanocrystals and Nitrogen-Vacancy centers in a cavity QED system. Confocal micro-photoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q 55,000, which is limited by the resolution of our spectrometer. We also demonstrate coarse tuning of cavity resonances across the 600-700nm range by lithographically scaling the size of fabricated devices. This is an order of magnitude improvement over previous SiNx cavities at this important wavelength range.

Why This Paper Matters

  • This paper contributes to the Photonic Quantum Computing research area in the Quantum Articles archive.
  • It adds a 2010 reference point for readers tracking recent quantum research.
  • Si3N4 is an excellent material for applications of nanophotonics at visible wavelengths due to its wide bandgap and moderately large refractive index n approx 2.0.

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References & Citation Signals

[1] DOI https://doi.org/arXiv:1010.6287 [2] arXiv https://arxiv.org/abs/1010.6287 [3] Publisher https://arxiv.org/abs/1010.6287

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