Gigahertz multimode vibrations in graphene and MoS(2) nanomechanical resonators at room temperature.

Probing and understanding ultrahigh-frequency/gigahertz (UHF/GHz) vibrations in atomic layer nanomechanical resonators holds strong promise for fundamental studies and technological applications, such as sensing, signal processing, and quantum engineering. However, accessing GHz flexural-mode resonances in such devices at room temperature has been challenging. Here, we demonstrate the first measurement of GHz flexural vibrations in graphene and molybdenum disulfide (MoS) resonators at room temperature, achieving multimode resonances () up to 1.09 GHz and quality factors () up to 5400 in multilayer MoS resonators, and up to 1.03 GHz with high 4500 in few-layer graphene resonators. Both s and s are the highest among reported atomic layer nanomechanical resonators at room temperature, yielding ×  5 × 10 Hz. We also reveal a scaling law with higher modes, which favors detecting GHz resonances. This study will enable exploiting multiple modes in atomic layer resonators toward resonant sensing and transduction functions at UHF/GHz.